Optical Failure Analysis Technique in Deep Submicron CMOS Integrated Circuits

نویسندگان

  • Sunkwon Kim
  • Hyongmin Lee
  • Hyunjoong Lee
  • Jong-Kwan Woo
  • Junho Cheon
  • Hwan-Yong Kim
  • Young June Park
  • Suhwan Kim
چکیده

In this paper, we have proposed a new approach for optical failure analysis which employs a CMOS photon-emitting circuitry, consisting of a flipflop based on a sense amplifier and a photon-emitting device. This method can be used even with deepsubmicron processes where conventional optical failure analyses are difficult to use due to the low sensitivity in the near infrared (NIR) region of the spectrum. The effectiveness of our approach has been proved by the failure analysis of a prototype designed and fabricated in 0.18 μm CMOS process.

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تاریخ انتشار 2011